Charged Particle-Induced Surface Reactions of Organometallic Complexes as a Guide to Precursor Design for Electron- and Ion-Induced Deposition of Nanostructures

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Authors: Jo-Chi Yu, Mohammed K. Abdel-Rahman, D. Howard Fairbrother, and Lisa McElwee-White

Journal title: ACS APPLIED MATERIALS & INTERFACES

Journal number: 13(41)

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 48333-48348

DOI identifier: 10.1021/acsami.1c12327

ISSN: 1944-8244