Surface-Anchored Metal–Organic Frameworks as Versatile Resists for Gas-Assisted E-Beam Lithography: Fabrication of Sub-10 Nanometer Structures

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Authors: Martin Drost, Fan Tu, Luisa Berger, Christian Preischl, Wencai Zhou, Hartmut Gliemann, Christof Wöll, Hubertus Marbach

Journal title: ACS Nano

Journal number: 12/4

Journal publisher: American Chemical Society

Published year: 2018

Published pages: 3825-3835

DOI identifier: 10.1021/acsnano.8b01071

ISSN: 1936-0851