Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η 3 -C 3 H 5 )Ru(CO) 3 Br

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Authors: Jakub Jurczyk, Christopher R. Brewer, Olivia M. Hawkins, Mikhail N. Polyakov, Czeslaw Kapusta, Lisa McElwee-White, Ivo Utke

Journal title: ACS Applied Materials & Interfaces

Journal number: 11/31

Journal publisher: American Chemical Society

Published year: 2019

Published pages: 28164-28171

DOI identifier: 10.1021/acsami.9b07634

ISSN: 1944-8244