Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

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Authors: Ivo Utke, Johann Michler, Robert Winkler, Harald Plank

Journal title: Micromachines

Journal number: 11/4

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2020

Published pages: 397

DOI identifier: 10.3390/mi11040397

ISSN: 2072-666X