High Sensitivity of Fluorine Gas-Assisted FIB-TOF-SIMS for Chemical Characterization of Buried Sublayers in Thin Films

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Authors: Agnieszka Priebe, Laszlo Pethö, Emese Huszar, Tianle Xie, Ivo Utke, Johann Michler

Journal title: ACS Applied Materials & Interfaces

Journal number: 13/13

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 15890-15900

DOI identifier: 10.1021/acsami.1c01627

ISSN: 1944-8244