Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies

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Authors: I. Utke, P. Swiderek, K. Höflich, K. Madajska, J. Jurczyk, P. Martinović, I.B. Szymańska

Journal title: Coordination Chemistry Reviews

Journal number: 458

Journal publisher: Elsevier BV

Published year: 2022

Published pages: 213851

DOI identifier: 10.1016/j.ccr.2021.213851

ISSN: 0010-8545