Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching

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Authors: Remo N. Widmer, David Bischof, Jakub Jurczyk, Markus Michler, Jakob Schwiedrzik, Johann Michler

Journal title: Materials & Design

Journal number: 204

Journal publisher: Elsevier BV

Published year: 2021

Published pages: 109670

DOI identifier: 10.1016/j.matdes.2021.109670

ISSN: 0264-1275