PECVD silicon nitride optical waveguide devices for sensing applications in the visible and <1µm near infrared wavelength region

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Authors: Rainer Hainberger, Paul Muellner, Stefan Nevlacsil, Florian Vogelbacher, Moritz Eggeling, Alejandro Maese-Novo, Martin Sagmeister, Guenther Koppitsch, Jochen Kraft, Xue Zhou, Jinhua Huang, Mingzhu Li, Ke-Jian Jiang, Yanlin Song

Journal title: Integrated Optics: Design, Devices, Systems, and Applications V

Journal publisher: SPIE

Published year: 2019

Published pages: 8

DOI identifier: 10.1117/12.2524277

ISBN: 9781510627291