Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications

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Authors: Martin Sagmeister, Günther Koppitsch, Paul Muellner, Stefan Nevlacsil, Alejandro MaeseNovo, Rainer Hainberger, Dana Seyringer, Jochen Kraft

Journal title: Proceedings

Journal number: 2/13

Journal publisher: MDPI

Published year: 2018

Published pages: 1023

DOI identifier: 10.3390/proceedings2131023

ISSN: 2504-3900