Development of a monolithically integrated, CMOS-compatible SiN photonics process flow for sensor and medical applications

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Authors: M. Sagmeister, S. Jessenig, P. Muellner, S. Nevlacsil, A. Maese-Novo, M. Eggeling, R. Hainberger, D. Seyringer, W. Drexler, E. Rank, J. Kraft

Journal title: INTERPHOTONICS 2019, 2nd International Congress on Photonics Research

Journal publisher: INTERPHOTONICS 2019

Published year: 2019

Published pages: 61