PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

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Authors: Rainer Hainberger, Paul Muellner, Stefan Nevlacsil, Moritz Eggeling, Alejandro Maese-Novo, Florian Vogelbacher, Martin Sagmeister, Jochen Kraft, Dana Seyringe, Sabine Trupp, Michael Henfling, Svenja Plesshoff, Jan Vaupot, Marcel Sladecek, Elisabet Rank, Wolfgang Drexler

Journal title: Optical Sensors and Sensing Congress

Journal publisher: OSA

Published year: 2020

Published pages: STh4G.1

DOI identifier: 10.1364/sensors.2020.sth4g.1

ISBN: 978-1-943580-78-1