CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications

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Authors: Rainer Hainberger, Paul Muellner, Moritz Eggeling, Alejandro Maese-Novo, Stefan Nevlacsil, Jörg Schotter, Florian Vogelbacher, Jochen Kraft, Martin Sagmeister, Xue Zhou, Jinhua Huang, Mingzhu Li, Ke-Jian Jiang, Yanlin Song, Dana Seyringer, Elisabet Rank, Wolfgang Drexler

Journal title: Integrated Optics: Devices, Materials, and Technologies XXIV

Journal number: 11283

Journal publisher: SPIE

Published year: 2020

Published pages: 23

DOI identifier: 10.1117/12.2543585

ISBN: 9781510633308