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Authors: Vahideh Ilbeigi, Stefan Matejcik
Journal title: 24th Symposium on Applications of Plasma Processes (SAPP XXIV) & the 13th EU-Japan Joint Symposium on Plasma Processing
Journal number: 24th, bianual
Journal publisher: SAPP-2023 Conference
Published year: 2023
Published pages: 33-35
ISBN: 978-80-972179-3-8
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