Dynamic piezoelectric MEMS-based optical metasurfaces

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Authors: Chao Meng; Paul Conrad Vaagen Thrane; Fei Ding; Jo Gjessing; Martin Thomaschewski; Cuo Wu; Cuo Wu; Christopher A. Dirdal; Sergey I. Bozhevolnyi

Journal title: Science Advances

Journal number: 31

Journal publisher: Science

Published year: 2021

DOI identifier: 10.1126/sciadv.abg5639

ISSN: 2375-2548