Sub-surface modifications in silicon with ultra-short pulsed lasers above 2 microns

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Authors: Richter, Roland A and Tolstik, Nikolai and Rigaud, Sebastien and Dalla Valle, Paul and Erbe, Andreas and Ebbinghaus, Petra and Astrauskas, Ignas and Kalashnikov, Vladimir and Sorokin, Evgeni and Sorokina, Irina T

Journal title: Journal of the Optical Society of America B

Journal number: 07403224

Journal publisher: Optical Society of America

Published year: 2020

DOI identifier: 10.1364/josab.396074

ISSN: 0740-3224