Low temperature atomic hydrogen annealing of InGaAs MOSFETs

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Authors: Patrik Olausson, Rohit Yadav, Rainer Timm and Erik Lind

Journal title: Semiconductor Science and Technology

Journal number: Volume 38, Number 5

Journal publisher: IOP Science

Published year: 2023

Published pages: 055001

DOI identifier: 10.1088/1361-6641/acc08c

ISSN: 1361-6641