Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

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Authors: Dongxu Wu; Fusheng Liang; Chengwei Kang; Fengzhou Fang; Fengzhou Fang

Journal title: Micromachines, Vol 12, Iss 164, p 164 (2021)

Journal number: 6

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2021

DOI identifier: 10.3390/mi12020164

ISSN: 2072-666X