Interdependence of piezoelectric coefficient and film thickness in LiTaO 3 cantilevers

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Authors: Anjneya Verma, Namanu Panayanthatta, Arun Ichangi, Thomas Fischer, Laurent Montes, Edwige Bano, Sanjay Mathur

Journal title: Journal of the American Ceramic Society

Journal number: 104/5

Journal publisher: American Ceramic Society

Published year: 2021

Published pages: 1966-1977

DOI identifier: 10.1111/jace.17606

ISSN: 0002-7820