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Authors: Michail E Kiziroglou, Eric M Yeatman
Journal title: Journal of Micromechanics and Microengineering
Journal number: 31/11
Journal publisher: Institute of Physics Publishing
Published year: 2021
Published pages: 114003
DOI identifier: 10.1088/1361-6439/ac2a52
ISSN: 0960-1317
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