Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

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Authors: G. Barrientos, G. Clementi, C. Trigona, M. Ouhabaz, L. Gauthier-Manuel, D. Belharet, S. Margueron, A. Bartasyte, G. Malandrino, S. Baglio

Journal title: Sensors

Journal number: 22 (2)

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2022

Published pages: 559

DOI identifier: 10.3390/s22020559

ISSN: 1424-8220