Inline surface topography measurements of ultrashort laser pulsed manufactured micro structures based on low coherence interferometry

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Authors: Rouwen Kunze, Robert Schmitt

Journal title: tm - Technisches Messen

Journal number: 84/9

Journal publisher: Oldenbourg Wissenschaftsverlag GmbH

Published year: 2017

Published pages: 575-586

DOI identifier: 10.1515/teme-2016-0074

ISSN:0171-8096