High-resolution, high-speed inline optical topography measurement system for laser micro-machining process control

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Authors: Folkersma, K.G.P.; Woldering, L.A.; Voss, K.H.J.; Pohl, R.; Resink, S.G.; Kunze, Rouwen; Schmitt, Robert; Klein, M.E.; Borreman, A.; de Hoon, C.J.A.

Journal publisher: Various

Published year: 2017