Etching characteristics of crystal quartz by surface wave microwave induced plasma

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Authors: Adam Bennett, Nan Yu, Marco Castelli, Guoda Chen, Fengzhou Fang

Journal title: AOPC 2020: Optics Ultra Precision Manufacturing and Testing

Journal publisher: SPIE

Published year: 2020

Published pages: 10

DOI identifier: 10.1117/12.2574947

ISBN: 9781510639584