Resistive switching characteristics of integrated polycrystalline hafnium oxide based one transistor and one resistor devices fabricated by atomic vapor deposition methods

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Authors: Hee-Dong Kim, Felice Crupi, Mindaugas Lukosius, Andreas Trusch, Christian Walczyk, Christian Wenger

Journal title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Journal number: 33/5

Journal publisher: AVS Science and Technology Society

Published year: 2015

Published pages: 052204

DOI identifier: 10.1116/1.4928412

ISSN: 2166-2754