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Authors: Eduardo PĂ©rez, Christian Wenger, Alessandro Grossi, Cristian Zambelli, Piero Olivo, Robin Roelofs
Journal title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Journal number: 35/1
Journal publisher: AVS Science and Technology Society
Published year: 2017
Published pages: 01A103
DOI identifier: 10.1116/1.4967308
ISSN: 2166-2754