Impact of HfO2 Deposition Techniques on the Switching Parameters in embedded 1T-1R Cells and Arrays

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Authors: A. Grossi, E. Perez, C. Zambelli, P. Olivo, Ch. Wenger

Journal title: Workshop on Dielectrics in Microelectronics (WoDiM 2016)

Journal publisher: unknown

Published year: 2016