Wafer-level hermetically sealed silicon photonic MEMS

Summary

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Authors: Gaehun Jo, Pierre Edinger, Simon J. Bleiker, Xiaojing Wang, Alain Yuji Takabayashi, Hamed Sattari, Niels Quack, Moises Jezzini, Jun Su Lee, Peter Verheyen, Iman Zand, Umar Khan, Wim Bogaerts, Göran Stemme, Kristinn B. Gylfason, and Frank Niklaus

Journal title: Photon. Res.

Journal publisher: Photonics Research

Published year: 2022

DOI identifier: 10.1364/prj.441215

ISSN: 2327-9125