Large-Scale Integration of 2D Material Heterostructures by Adhesive Bonding

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Authors: Arne Quellmalz, Xiaojing Wang, Stefan Wagner, Simon Sawallich, Max C. Lemme, Kristinn B. Gylfason, Niclas Roxhed, Goran Stemme, Frank Niklaus

Journal title: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Journal publisher: IEEE

Published year: 2020

Published pages: 943-945

DOI identifier: 10.1109/mems46641.2020.9056203

ISBN: 978-1-7281-3581-6