Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory

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Authors: Dinesh Pamunuwa, Elliott Worsey, Jamie D Reynolds, Derek Seward, Harold M H Chong, Sunil Rana

Journal title: IEEE Journal of Microelectromechanical Systems

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/jmems.2021.3138022

ISSN: 1941-0158