Wafer-level hermetically sealed silicon photonic MEMS

Summary

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Authors: Gaehun Jo, Pierre Edinger, Simon J. Bleiker, Xiaojing Wang, Alain Yuji Takabayashi, Hamed Sattari, Niels Quack, Moises Jezzini, Jun Su Lee, Peter Verheyen, Iman Zand, Umar Khan, Wim Bogaerts, Göran Stemme, Kristinn B. Gylfason, and Frank Niklaus

Journal title: Photonics Research

Journal publisher: Optica Publishing Group and Chinese Laser Press (CLP)

Published year: 2022

DOI identifier: 10.1364/prj.441215

ISSN: 2327-9125