Wafer-level vacuum sealing for packaging of silicon photonic MEMS

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Authors: Gaehun Jo, Pierre Edinger, Simon Bleiker, Xiaojing Wang, Alain Y. Takabayashi, Hamed Sattari, Niels Quack, Moises A. Jezzini de Anda, Peter Verheyen, Göran Stemme, Wim Bogaerts, Kristinn B. Gylfason, Frank Niklaus

Journal title: Silicon Photonics XVI

Journal publisher: SPIE

Published year: 2021

Published pages: 11

DOI identifier: 10.1117/12.2582975

ISBN: 9781510642188