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Authors: S. Morawiec, M.J. Mendes, F. Priolo, I. Crupi
Journal title: Materials Science in Semiconductor Processing
Journal number: 92
Journal publisher: Pergamon Press
Published year: 2019
Published pages: 10-18
DOI identifier: 10.1016/j.mssp.2018.04.035
ISSN: 1369-8001