Periodic Reporting for period 1 - APT-Met (Atom Probe Tomography (APT) Metrology for future 3D semiconductor devices)

Summary
The objective behind the APT Met project was a training by research proposal for the emerging and exciting field of Atom Probe Tomography (APT). Fundamental to this project were the metrology and training advances needed to underpin its future for 3-dimensional (3D)...
More information & hyperlinks
Web resources: http://www.imec.be