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Authors: Maria Sygletou, Francesco Bisio, Stefania Benedetti, Piero Torelli, Alessandro di Bona, Aleksandr Petrov, Maurizio Canepa
Journal title: Journal of Vacuum Science & Technology B
Journal number: 37/6
Journal publisher: AVS Science and Technology Society
Published year: 2019
Published pages: 061209
DOI identifier: 10.1116/1.5122175
ISSN: 2166-2754