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Authors: Daniel T. Yimam, Heng Zhang, Jamo Momand, Bart J. Kooi
Journal title: Materials Science in Semiconductor Processing
Journal number: 133
Journal publisher: Pergamon Press
Published year: 2021
Published pages: 105965
DOI identifier: 10.1016/j.mssp.2021.105965
ISSN: 1369-8001