Modified astigmatic beam technique for laser writing

Summary

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Authors: Jerome Lapointe; Jean-Philippe Bérubé; Albert Dupont; Matthieu Bellec; Réal Vallée

Journal title: Applied Optics

Journal number: 21593930

Journal publisher: Optical Society of America

Published year: 2022

Published pages: 2333-2337

DOI identifier: 10.1364/ao.454380

ISSN: 2159-3930