Realization of functional nanophotonic circuits by hybrid 2D-3D integration

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Authors: Wolfram H. P. Pernice

Journal title: Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII

Journal publisher: SPIE

Published year: 2020

Published pages: 112920L

DOI identifier: 10.1117/12.2545593