Fully embedded photonic crystal cavity with Q=06 million fabricated within a full-process CMOS multiproject wafer

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Authors: Delphin Dodane, Jérôme Bourderionnet, Sylvain Combrié, Alfredo de Rossi

Journal title: Optics Express

Journal number: 26/16

Journal publisher: Optical Society of America

Published year: 2018

Published pages: 20868

DOI identifier: 10.1364/oe.26.020868

ISSN: 1094-4087