The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

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Authors: Victor Deinhart, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I. Bolotin, Stephanie Reich and Katja Höflich

Journal title: Beilstein Journal of Nanotechnology

Journal number: Volume 12

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2021

Published pages: 304-318

DOI identifier: 10.3762/bjnano.12.25

ISSN: 2190-4286