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Authors: Matin Yahyavi Zanjani, PD Dr.-Ing. habil. Dipl.-Phys. Mattias Hackert‐Oschätzchen, André Martin, Prof. Dr.-Ing. Andreas Schubert
Journal title: Euspen Special Interest Group Meeting Micro / NanoManufacturing, 8th and 9th November 2017
Journal publisher: European Society for Precision Engineering and Nanotechnology (Euspen)
Published year: 2017