Process Understanding of Plasma Electrolytic Polishing through Multiphysics Simulation and Inline Metrology

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Authors: Igor Danilov, Matthias Hackert-Oschätzchen, Mike Zinecker, Gunnar Meichsner, Jan Edelmann, Andreas Schubert

Journal title: Micromachines

Journal number: 10/3

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2019

Published pages: 214

DOI identifier: 10.3390/mi10030214

ISSN: 2072-666X