Performance verification of focus variation and confocal microscopes measuring tilted ultra-fine surfaces

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Authors: Danilo Quagliotti, Federico Baruffi, Guido Tosello, Stefania Gasparin, Massimiliano Annoni, Paolo Parenti, Rene Sobiecki, Hans Nørgaard Hansen

Journal title: Proceedings of the 16th euspen International Conference & Exhibition

Journal publisher: euspen

Published year: 2016