Atomic layer deposited oxide films as protective interface layers for integrated graphene transfer

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Authors: A Cabrero-Vilatela, J A Alexander-Webber, A A Sagade, A I Aria, P Braeuninger-Weimer, M-B Martin, R S Weatherup, S Hofmann

Journal title: Nanotechnology

Journal number: 28/48

Journal publisher: Institute of Physics Publishing

Published year: 2017

Published pages: 485201

DOI identifier: 10.1088/1361-6528/aa940c

ISSN: 0957-4484