A Deep Regression Framework Towards Laboratory Accuracy in the Shop Floor of Microelectronics

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Authors: Apostolos Evangelidis, Nikolaos Dimitriou, Lampros Leontaris, Dimosthenis Ioannidis, Gregory Tinker, Dimitrios Tzovaras

Journal title: IEEE Transactions on Industrial Informatics

Journal number: 1

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2022

Published pages: 1-10

DOI identifier: 10.1109/tii.2022.3182343

ISSN:1551-3203