MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

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Authors: Hoa Thanh Le, Rubaiyet I. Haque, Ziwei Ouyang, Seung Woo Lee, Shelley I. Fried, Ding Zhao, Min Qiu, Anpan Han

Journal title: Microsystems & Nanoengineering

Journal number: 7/1

Journal publisher: Springer Nature (online)

Published year: 2021

DOI identifier: 10.1038/s41378-021-00275-w

ISSN: 2055-7434