Ice lithography using tungsten hexacarbonyl

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Authors: Rubaiyet I. Haque, Affan Kaysa Waafi, Bingdong Chang, Anpan Han

Journal title: Micro and Nano Engineering

Journal number: 18

Journal publisher: Elsevier

Published year: 2023

Published pages: 100171

DOI identifier: 10.1016/j.mne.2023.100171

ISSN: 2590-0072