80 K cryogenic stage for ice lithography

Summary

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Authors: Rubaiyet I. Haque, Affan K. Waafi, Kim Jaemin, Danick Briand, Anpan Han

Journal title: Micro and Nano Engineering

Journal number: volume 14

Journal publisher: Elsevier

Published year: 2022

DOI identifier: 10.1016/j.mne.2021.100101

ISSN: 2590-0072