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Authors: T Larsen, S Schmid, S Dohn, J E Sader, A Boisen, L G Villanueva
Journal title: Journal of Micromechanics and Microengineering
Journal number: 27/3
Journal publisher: Institute of Physics Publishing
Published year: 2017
Published pages: 035006
DOI identifier: 10.1088/1361-6439/aa591e
ISSN: 0960-1317