Rise time reduction of thermal actuators operated in air and water through optimized pre-shaped open-loop driving

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Authors: T Larsen, J C Doll, F Loizeau, N Hosseini, A W Peng, G E Fantner, A J Ricci, B L Pruitt

Journal title: Journal of Micromechanics and Microengineering

Journal number: 27/4

Journal publisher: Institute of Physics Publishing

Published year: 2017

Published pages: 045005

DOI identifier: 10.1088/1361-6439/aa5fd2

ISSN: 0960-1317