Development of a scanner-based direct laser interference patterning optical head: new surface structuring opportunities

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Authors: Tim Kunze, Christoph Zwahr, Benjamin Krupop, Sabri Alamri, Florian Rößler, Andrés Fabián Lasagni

Journal title: Laser-based Micro- and Nanoprocessing XI

Journal publisher: SPIE

Published year: 2017

Published pages: 1009214

DOI identifier: 10.1117/12.2251745